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Änderungen an Schritt Nr. 3

Bearbeitet von Miroslav Djuric -

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-[* black] When looking at the MEMS die, you get a feeling of how they function. The microphone itself has a quite simple design, comprising two parallel polysilicon plates separated by a small air gap. The upper plate (poly 2) is perforated with an array of small holes (which are needed for the MEMS release etch). A solid poly 1 plate forms the bottom capacitor plate
+[* black] Looking at the S1950 MEMS die gives you an idea of how it functions. The microphone itself has a simple design, comprising of two parallel [link|http://en.wikipedia.org/wiki/Polycrystalline_silicon|polysilicon] plates -- basically, very thin plates made of multiple small silicon crystals.
+[* black] The upper plate is perforated with an array of small holes, and they're separated by a small air gap. A solid bottom capacitor plate senses and relays the vibrations that occur when someone speaks into the microphone.

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