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Änderungen an Schritt Nr. 3

Bearbeitet von Miroslav Djuric -

Wartet auf Freigabe



+[* black] When looking at the MEMS die, you get a feeling of how they function. The microphone itself has a quite simple design, comprising two parallel polysilicon plates separated by a small air gap. The upper plate (poly 2) is perforated with an array of small holes (which are needed for the MEMS release etch). A solid poly 1 plate forms the bottom capacitor plate